Application to micro-optics

Sources

Sources include:

  • thermal sources

  • semi-conductor devices:

    • LEDs

    • Vertical cavity surface emitting laser (VCEL)

We can notice that these devices using Microsystems micro-fabrication technologies are not always considered Microsystems. But the integration resources prove that they are obviously part of more complex Microsystems.

Example of VCEL:

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Those micro-lasers can be tunable by micro-displacements of the deformable mirror of the cavity output.

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