APCVD : Atmospheric Pressure Chemical Vapor Deposition
CI : Circuit Intégré
CVD : Chemical Vapor Deposition
DMD : Digital Micromirror Devices
Ge : Germanium
LPCVD : Low Pressure Chemical Vapor Deposition
MENS : Micro-Electro-Mechanical Systems
MOEMS : Micro-Optical-Electro-Mechanical Systems
MOS : Metal-Oxide-Silicon
PECVD : Plasma Enhanced Chemical Vapor Deposition
PVD : Physical Vapor Deposition
RF : Radio-Fréquence
RIE : Reactive Ion Etching
Si : Silicium
SLM : Spatial Light Modulator
SOI : Silicon On Insulator
WDM : Wavelength Division Multiplexer