1970: CCD (Bell Labs)
1974: Sensor 100 x 100 pixels (Fairchild)
Sensitivity: IR and Visible
1993: Sensor CMOS (NASA JPL)
2000: Sensor 7186 x 9216 pixels (Philips)
Sensitivity: IR, Visible, X
2007: CCD sensor 9216 x 9216 pixels
2007: CMOS sensor SA1: 5400 fr/s for 1Mpixel (Photron)
2009: Dalsa sensor for Mamiya : 22Mpixels for 36x48mm
2009: Photron sensor SA5 : 5400fr/s for 1Mpixel... in colors